Silicon Nanowires: Growth Studies Using Pulsed PECVD
نویسندگان
چکیده
منابع مشابه
Pulsed PECVD Growth of Silicon Nanowires on Various Substrates
Silicon nanowires with high aspect ratio were grown using PPECVD and a gold catalyst on a variety of different substrates. The morphology of the nanowires was investigated for a range of crystalline silicon, glass, metal, ITO coated and amorphous silicon coated glass substrates. Deposition of the nanowires was carried out in a parallel plate PECVD chamber modified for PPECVD using a 1kHz square...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 2007
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-0989-a23-03